Use case --- MEMS waveform generator and adiabatic logic circuits using the same https://patents.google.com/patent/US20050253571A1/en?q=Driving+Fully-Adiabatic+Logic+C[…]diabatic+Logic+Circuits+Using+Custom+High-Q+MEMS+Resonators Question --- if get fab'd, say minimal FAB, possible to efabless (some fab) BEOL?