tnt
06/14/2024, 6:38 PMhttps://i.imgur.com/p4Zoq85.png▾
mpw_precheck
... but still the 0.11u between the psdm
and the ndiff
on the left is less than 0.13u from psd.7
. Or is it ok because there is an abutting edge ?Mitch Bailey
06/14/2024, 11:05 PMgds maskhints yes
?
In klayout, drc may be running in deep mode where this would pass, but be caught in flat mode.tnt
06/15/2024, 6:20 AMtnt
06/15/2024, 6:23 AMTim Edwards
06/16/2024, 12:06 AMpsd.1
and psd.2
in the MR deck rules; generally, implant layer width and spacing are the two critical measurements that form an actual manufacturing rule violation (i.e., could physically screw up the mask by creating tiny areas of material that flake away and drift around).
Situations like this underscore the need for a full DRC deck for klayout. Implementing just the MR rules in klayout is insufficient, and implementing a full deck in magic just slows it down, although it can be done in a drc style that is intended to be run in batch mode.tnt
06/16/2024, 8:42 AMTim Edwards
06/16/2024, 1:04 PMtnt
06/16/2024, 1:12 PMTim Edwards
06/16/2024, 5:04 PM