tnt
04/22/2024, 9:51 PMMin MM1_oxide_Pattern_density = 0.7
and Max pattern density (PD) of met1 = 0.77
so I need to hit between 70% and 77% of met1
density ? That seems like a pretty narrow target to hit ...Mitch Bailey
04/22/2024, 10:28 PMtnt
04/23/2024, 6:25 AMMN1_oxide
and not met1
so maybe something else is included in that min area ? )Mitch Bailey
04/23/2024, 9:26 AMtnt
04/23/2024, 9:48 AMMitch Bailey
04/23/2024, 10:51 AMtnt
04/23/2024, 4:00 PMtnt
04/23/2024, 4:07 PMli
through met4
density needs to be between 0.35 and 0.6 and is tested all at once on the chip, no window.
• met5
density is from 0.45 to 0.76tnt
04/23/2024, 5:13 PMTim Edwards
04/23/2024, 7:03 PMDavid Lindley
04/23/2024, 7:30 PMtnt
04/24/2024, 10:57 AMDavid Lindley
04/24/2024, 1:26 PMMitch Bailey
04/24/2024, 1:50 PMI am concerned about the lack of the metal 700x700 stepped check in the current rules.This.
David Lindley
04/24/2024, 4:54 PMtnt
04/24/2024, 4:55 PMDavid Lindley
04/24/2024, 4:58 PM