I tried creating an LVS deck and it is "almost" working. I am comparing with the freepdk45 tech file which works, but this one fails to match the top level netlist with we run "align". Info on LVS in klayout is here: https://www.klayout.de/doc/manual/lvs_intro.html Can anyone help? You can execute "run_lvs.sh" to run the comparison of pinv.gds and pinv.sp.