Poly resistors will be patterned before any connec...
# sky130
j
Poly resistors will be patterned before any connection to a MOS gate is made, so I believe antenna effects will not apply. CMP pertains to the interlevel dielectrics, not conductor layers. Classical antenna charging occurs as the conductor sheets reach end-of-etch and individual nets appear; the plasma etch then attacks the remaining sidewalls until end-of-etch.