What open source lithography (simulation, OPC, etc.) tools do people know of? I'm only aware of this one which is kind-of open source (research only, must request access to code): https://www.cerc.utexas.edu/utda/download/ELIAS/index.html

I think Mentor is based on SPLAT. Quick search I only found user manual: https://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2725.html Don't know if source code can still be found somewhere.

A couple more: https://github.com/pierremifasol/Lithography-Simulation https://github.com/vincentlv/DimmiLitho

I'm just curious what you plan to use it for on sky130. I didn't think OPC can into play at 130.

@User there is definitely OPC on (at least) FOM, LI, M1. They use rule based OPC. This is very evident in the memory cells

Thanks I learned something 🙂

Oh and poly of course. The rules seem pretty simple, but I was thinking about seeing if we could "verify" some of it to produce additional types of bitcells