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#sky130
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# sky130
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Matthew Guthaus

11/12/2021, 7:41 PM
What open source lithography (simulation, OPC, etc.) tools do people know of? I'm only aware of this one which is kind-of open source (research only, must request access to code): https://www.cerc.utexas.edu/utda/download/ELIAS/index.html
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FatsieFS

11/16/2021, 1:58 PM
I think Mentor is based on SPLAT. Quick search I only found user manual: https://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2725.html Don't know if source code can still be found somewhere.
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Matt Liberty

11/22/2021, 4:20 PM
I'm just curious what you plan to use it for on sky130. I didn't think OPC can into play at 130.
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Matthew Guthaus

11/22/2021, 4:30 PM
@User there is definitely OPC on (at least) FOM, LI, M1. They use rule based OPC. This is very evident in the memory cells
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Matt Liberty

11/22/2021, 4:45 PM
Thanks I learned something 🙂
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Matthew Guthaus

11/22/2021, 5:02 PM
Oh and poly of course. The rules seem pretty simple, but I was thinking about seeing if we could "verify" some of it to produce additional types of bitcells
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