What open source lithography (simulation, OPC, etc.) tools do people know of?
I'm only aware of this one which is kind-of open source (research only, must request access to code):
https://www.cerc.utexas.edu/utda/download/ELIAS/index.html
I'm just curious what you plan to use it for on sky130. I didn't think OPC can into play at 130.
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Matthew Guthaus
11/22/2021, 4:30 PM
@User there is definitely OPC on (at least) FOM, LI, M1. They use rule based OPC. This is very evident in the memory cells
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Matt Liberty
11/22/2021, 4:45 PM
Thanks I learned something 🙂
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Matthew Guthaus
11/22/2021, 5:02 PM
Oh and poly of course. The rules seem pretty simple, but I was thinking about seeing if we could "verify" some of it to produce additional types of bitcells