@User: A good person to contact is Andreas Andreou at Johns Hopkins University. He built out a small fabrication laboratory 25 or so years ago with all used equipment obtained on the cheap. I think it was probably good for around 10um, which is a good target if you don't want to install lots of HVAC equipment to get a decent clean room. I'm sure there are others who have done similar things, but Andreas' lab is the one I happen to know about. I think the main thing is to find out where to go to get 2nd-hand equipment at auction.