Hello,
I am wondering if there are any details about the Sky130 fabrication process published?
What I am in general interested would be the different doping steps, including:
• Order of the doping steps
• Doping profiles for each step (or implantation doses and implantation energies etc.)
This would be used in the context of TCAD simulations, for fabricating more exotic devices, such as radiation and photon detectors.
In the
#analog-design channel, there were a few high-level discussions about TCAD in the past (in 2020 or so), but nothing ever transpired.
The only slightly relevant information that I could found, was under "Semiconductor Criteria" in the docs:
https://skywater-pdk.readthedocs.io/en/main/rules/assumptions.html#process-stack-diagram
But there only seem to be information about the P-Well and N-Well doping as two single numbers.
Am I correct in assuming, that this type of information is not published by Skywater as part of the PDK?