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```Spacing of metal3 features attached to and within 0.40um of large metal3 < 0.4um (met3.3c) Spa...
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Spacing of metal3 features attached to and within 0.40um of large metal3 < 0.4um (met3.3c)
Spacing of metal4 features attached to and within 0.40um of large metal4 < 0.4um (met4.5a)
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