Is it possible to do MEMS design with the Sky130 P...
# vlsi101a
Abel
02/01/2022, 12:46 PMIs it possible to do MEMS design with the Sky130 PDK and Magic/Klayout?
Looking at the fact that only regular shapes are allowed in both these tools, I think that the answer is going to be no.
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Amro Tork
02/02/2022, 6:29 AMHi @User
This Skywaters process that we are using is not a MEMS process. MEMS processes are different. I don't know if Skywaters have a different process that is MEMS. But even if they do, it's not open source.
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Abel
02/02/2022, 7:18 AMThat's new information to me. I had the misconception that all the fabrication followed the same tools and steps.
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Amro Tork
02/02/2022, 8:28 AMNo
Amro Tork
02/02/2022, 8:28 AMFabrication processes ar different based on what you are trying to do.
Amro Tork
02/02/2022, 8:29 AMSiGe is different than Bulk CMOS we are using
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Tim Edwards
02/07/2022, 2:59 AM@User: What do you mean by "only regular shapes are allowed", anyway?
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Abel
02/07/2022, 3:42 AMAt the time what I meant was I could not draw a good shape other than approximating with squares or stack up 2 same layers.
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Tim Edwards
02/07/2022, 1:55 PMI still don't get that comment. If any shape can be produced on a mask, magic and klayout can both represent it. I have done MEMS layout in magic many times.
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Abel
02/07/2022, 4:00 PMMy comment was made without knowing the differences in fabrication process.
Abel
02/07/2022, 4:02 PMI thought that the same Sky130 PDK or OSU PDK can be used to create MEMS devices as well.
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Amro Tork
02/07/2022, 6:15 PM@User limitation is not in the tools. It's in the fabrication process.
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