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12/17/2024, 2:26 PMklayout -n sg13g2 -zz -r $PDK_ROOT/$PDK/libs.tech/klayout/tech/scripts/filler.py -rd output_file=./design_filled.gds design_nofill.gds
It is mandatory to have a sealring in the design.
In order to control metal filler densities user can modify the following scripts:
$PDK_ROOT/$PDK/libs.tech/klayout/tech/scripts/macros/sg13g2_filler_Metal.lym
$PDK_ROOT/$PDK/libs.tech/klayout/tech/scripts/macros/sg13g2_filler_TopMetal.lym
where the width, length and also the distance between the filler cells can be altered. Please respect the DRC rules related to the sizes and separation of the filler cells (sections 5.18 and 5.23 of the SG13G2_Layout_Rules_os.pdf document).
While running minimal DRC in klayout one can expect AFil.g2, M1-5Fil.h errors related to the area outside the design, where the densities are calculated. The errors can be waived.
Special thanks to Daniel Schultz for providing the scripts.
IHP-GmbH/IHP-Open-PDK
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12/17/2024, 2:26 PM