I did a statistical simulation for the MIM capacitors and got a mean of 74.5fF and a standard deviation of 2.4fF (n=1000) for a 7x7um2 capacitor. This value is extremely high, but seems to match simulation results included in the PDK (libs.tech/xschem/simulations/fig). Maybe process variation is included? Furthermore, increasing the area does not result in a reduction of the standard deviation delta C/C as I would have expected. I would appreciate any comments or insights.