Hello everyone, I'm new here, I would ask about the capacitor mim m3 layout. Can anyone explain for each layer? and what is the small rectangle on the right side?

It’s just there to provide a connection to the bottom plate. Using the upper metal to connect to the bottom plates avoids some common bottom plate to bottom plate metal spacing rules.

I see, thank you very much

Correction: Using the upper metal to connect to the bottom plate avoids a common antenna violation issue.

Something I wondered about about big metal hunks like this - I assume you guys handle fill and cheesing? I never had to do that myself aside from some big analog caps where I didn’t trust the automated process.

@Mark Anderson: You never want to cheese a MiM cap. SkyWater specifies that metals > 30um width must be slotted, so keep MiM caps less than 30um. In the more general case, though, I don't think SkyWater does automatic slotting (although I know foundries which do). We should probably flagging large metal areas as a DRC violation.