@Tim Edwards How to select a via already added in layout and copy-paste it at some other location? I am trying to do as shown in attached steps but unable to do it.

In that case, you want the via and the surrounding metal. Draw the initial one like you did, then do

select area via2,m2,m3

to capture all the parts of the via (but nothing under it), then do, e.g.,

copy e 0.6um

(whatever the proper distance is to the next transistor). Repeat the copy command as many times as needed. Another method is to select the via as mentioned above, redraw the cursor box out to the next transistor (or do

box width 0.6um

, again with the correct distance to the next transistor) and then do

array 6 1

to instantly make five copies at the same pitch.